Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2012
ISSN: 0924-4247
DOI: 10.1016/j.sna.2012.03.034